JPH058769B2 - - Google Patents

Info

Publication number
JPH058769B2
JPH058769B2 JP59270551A JP27055184A JPH058769B2 JP H058769 B2 JPH058769 B2 JP H058769B2 JP 59270551 A JP59270551 A JP 59270551A JP 27055184 A JP27055184 A JP 27055184A JP H058769 B2 JPH058769 B2 JP H058769B2
Authority
JP
Japan
Prior art keywords
mirror
axis
reflector
light beam
symmetry
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59270551A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60157027A (ja
Inventor
Tanku Fuorukaa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DOITSUCHE FUORUSHUNKUSANSHUTARUTO FUYURU RUFUTO UNTO RAUMUFUAARUTO EE FUAU
Original Assignee
DOITSUCHE FUORUSHUNKUSANSHUTARUTO FUYURU RUFUTO UNTO RAUMUFUAARUTO EE FUAU
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by DOITSUCHE FUORUSHUNKUSANSHUTARUTO FUYURU RUFUTO UNTO RAUMUFUAARUTO EE FUAU filed Critical DOITSUCHE FUORUSHUNKUSANSHUTARUTO FUYURU RUFUTO UNTO RAUMUFUAARUTO EE FUAU
Publication of JPS60157027A publication Critical patent/JPS60157027A/ja
Publication of JPH058769B2 publication Critical patent/JPH058769B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G01J3/453—Interferometric spectrometry by correlation of the amplitudes

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
JP27055184A 1983-12-22 1984-12-21 マイケルソン原理による干渉計 Granted JPS60157027A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE3346455.3 1983-12-22
DE19833346455 DE3346455A1 (de) 1983-12-22 1983-12-22 Interferometer
DE3431040.1 1984-08-23

Publications (2)

Publication Number Publication Date
JPS60157027A JPS60157027A (ja) 1985-08-17
JPH058769B2 true JPH058769B2 (en]) 1993-02-03

Family

ID=6217734

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27055184A Granted JPS60157027A (ja) 1983-12-22 1984-12-21 マイケルソン原理による干渉計

Country Status (3)

Country Link
JP (1) JPS60157027A (en])
DD (1) DD228353A5 (en])
DE (1) DE3346455A1 (en])

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6130723A (ja) * 1984-07-24 1986-02-13 Jeol Ltd 干渉計
DE3826149A1 (de) * 1988-08-01 1990-02-08 Deutsche Forsch Luft Raumfahrt Einrichtung zur messung des drehwinkels oder der winkelstellung eines rotierenden objektes
EP0443477B1 (de) * 1990-02-21 1993-09-01 Deutsches Zentrum für Luft- und Raumfahrt e.V. Interferometer nach Michelson zur Erzeugung optischer Wegunterschiede
DE4136300C1 (en) * 1991-11-04 1993-02-25 Deutsche Forschungsanstalt Fuer Luft- Und Raumfahrt Ev, 5300 Bonn, De Michelson type interferometer using single rotating retroreflector - with aperture receiving split light beam halves deflected against each other by mirrors
TW228568B (en]) * 1991-08-30 1994-08-21 Forschungsanstalt Fur Luftund Raumfahrt E V Deutsche
DE4215871C2 (de) * 1992-05-14 1995-04-13 Deutsche Forsch Luft Raumfahrt Interferometer nach Michelson
DE19756936C1 (de) * 1997-12-20 1999-03-11 Deutsch Zentr Luft & Raumfahrt Interferometer nach Michelson
JP4994991B2 (ja) * 2007-08-06 2012-08-08 株式会社ミツトヨ 微細形状測定装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3005520C2 (de) * 1980-02-14 1983-05-05 Kayser-Threde GmbH, 8000 München Zweistrahl-Interferometer zur Fourierspektroskopie

Also Published As

Publication number Publication date
DE3346455A1 (de) 1985-07-11
DD228353A5 (de) 1985-10-09
JPS60157027A (ja) 1985-08-17

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